The Cu 2p XPS spectrum is still the signal most used for this purpose. iterative method for determining the MgF2 layer thicknesses by XPS using. These parameters are very useful for identification of the different states present in the surface but they are difficult to quantify as relative amounts of each species. Area ratios were calculated using the CasaXPS modeling software (Casa. Poulston et al., in their study of surface oxidation and reduction of Cu 2O and CuO, have used both the Cu LMM and the Auger parameter to distinguish Cu(0), Cu(I) and Cu(II). They also note the distinctive Cu L 3M 4,5M 4,5 peak at 916.5 eV for Cu 2O. have shown (in their Figure 8) the distinctly different peak shapes of the X-ray generated Auger LMM spectra for copper as the metal, Cu 2S and CuS. Based on the above theoretical calculation model of layered elastic half space, the thickness of XPS is taken as 40 mm and 60 mm, respectively, and the minimum thickness of the leveling layer of seven groups of different materials is calculated, so as to provide theoretical support for the actual laying of the leveling layer. The use of the modified Auger parameter (2 p 3/2, L 3M 45M 45) as well as an inspection of the Auger peak-shape do allow for a more accurate assignment for these species and has been used effectively. Of note here is the statistically similar BE values for the Cu metal and Cu(I) oxide species. Table 1 lists Cu 2 p 3/2 BE and modified Auger parameter values from a survey of literature sources compiled in the NIST Database.
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